Deformation of octahedron slotted metal tracks

verfasst von

Jörg Kludt, Kirsten Weide-Zaage, Markus Ackermann, Verena Hein

Abstract

The advantage of an increased lifetime of slotted metal tracks for the use in integrated circuits has already been shown. A benefit for slotted metal track geometries especially for thick metal tracks under DC and DC pulsed stress test conditions could be confirmed by lifetime measurements. To achieve a higher current capability these metal tracks, also known as 'power metals', were used in upper metallization layers. This new design concept shows a better robustness towards electromigration in comparison to conventional wide unslotted metal tracks. A new concept deals with the use of slotted geometries in lower metallization layers. Simulations show a decrease of von Mises stress in comparison to unslotted metal tracks. This behaviour can reduce the current shift of active and passive devices due to the imposed stress of the lower metallization layers.

Organisationseinheit(en)

Laboratorium f. Informationstechnologie

Externe Organisation(en)

X-FAB Silicon Foundries SE

Typ

Aufsatz in Konferenzband

Seiten

161-165

Anzahl der Seiten

5

Publikationsdatum

2013

Publikationsstatus

Veröffentlicht

Peer-reviewed

Ja

ASJC Scopus Sachgebiete

Elektrotechnik und Elektronik, Sicherheit, Risiko, Zuverlässigkeit und Qualität, Elektronische, optische und magnetische Materialien

Elektronische Version(en)

https://doi.org/10.1109/IIRW.2013.6804184 (Zugang: Unbekannt)