3-D time-depending electro- and thermomigration simulation of metallization structures

verfasst von

D. Dalleau, K. Weide-Zaage

Abstract

For reliability prediction in metallization structures the different migration mechanisms caused by high loading conditions become more and more important. With numerical methods like the finite element method (FEM), it is possible to determine the weakest part of the structure. This paper presents a new method for time dependent 3-dimensional degradation simulations of metallization structures stressed by high current densities. The FE-method offers the possibility to predict the progress of the degradation, and to estimate the reliability by calculating the corresponding Time To Failure (TTF) value. The simulation results are in good agreement with SEM observations and measurements.

Organisationseinheit(en)

Laboratorium f. Informationstechnologie

Typ

Konferenzaufsatz in Fachzeitschrift

Journal

Advanced Metallization Conference (AMC)

Seiten

477-481

Anzahl der Seiten

5

ISSN

1048-0854

Publikationsdatum

2000

Publikationsstatus

Veröffentlicht

Peer-reviewed

Ja

ASJC Scopus Sachgebiete

Chemische Verfahrenstechnik (insg.)